Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films

Milad Madadi, Juho Heiska, Jenna Multia, Maarit Karppinen*

*Tämän työn vastaava kirjoittaja

Tutkimustuotos: LehtiartikkeliReview ArticleScientificvertaisarvioitu

3 Sitaatiot (Scopus)
14 Lataukset (Pure)

Abstrakti

Atomic layer deposition (ALD) is the fastest growing thin-film technology in microelectronics, but it is also recognized as a promising fabrication strategy for various alkali-metal-based thin films in emerging energy technologies, the spearhead application being the Li-ion battery. Since the pioneering work in 2009 for Li-containing thin films, the field has been rapidly growing and also widened from lithium to other alkali metals. Moreover, alkali-metal-based metal-organic thin films have been successfully grown by combining molecular layer deposition (MLD) cycles of the organic molecules with the ALD cycles of the alkali metal precursor. The current literature describes already around 100 ALD and ALD/MLD processes for alkali-metal-bearing materials. Interestingly, some of these materials cannot even be made by any other synthesis route. In this review, our intention is to present the current state of research in the field by (i) summarizing the ALD and ALD/MLD processes so far developed for the different alkali metals, (ii) highlighting the most intriguing thin-film materials obtained thereof, and (iii) addressing both the advantages and limitations of ALD and MLD in the application space of these materials. Finally, (iv) a brief outlook for the future perspectives and challenges of the field is given.

AlkuperäiskieliEnglanti
Sivut56793–56811
Sivumäärä19
JulkaisuACS Applied Materials and Interfaces
Vuosikerta13
Numero48
Varhainen verkossa julkaisun päivämäärä26 marraskuuta 2021
DOI - pysyväislinkit
TilaJulkaistu - 8 joulukuuta 2021
OKM-julkaisutyyppiA2 Arvio tiedejulkaisuussa (artikkeli)

Sormenjälki

Sukella tutkimusaiheisiin 'Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films'. Ne muodostavat yhdessä ainutlaatuisen sormenjäljen.

Siteeraa tätä