@inproceedings{2ccc973dda5541c987a37968cb8e4432,
title = "Approximating circles by polygons in anisotropic echting of (100) silicon",
keywords = "anisotropic etching, micromechanics, polygons, silicon, anisotropic etching, micromechanics, polygons, silicon, anisotropic etching, micromechanics, polygons, silicon",
author = "V. Voipio and K. Nera and K. Ruokonen and T. Lamminm{\"a}ki and I. Tittonen",
year = "1999",
language = "English",
pages = "531--532",
booktitle = "Eurosensors XIII, The Hague, The Netherlands, September 12-15, 1999",
}