@article{173dfa89606f477a9dd5ecd50680c542,
title = "Analysis of ALD-processed thin films by ion-beam techniques",
keywords = "Atomic layer deposition, Electroluminescent displays, High-k insulators, Ion-beam techniques, Thin films, Atomic layer deposition, Electroluminescent displays, High-k insulators, Ion-beam techniques, Thin films, Atomic layer deposition, Electroluminescent displays, High-k insulators, Ion-beam techniques, Thin films",
author = "Matti Putkonen and Timo Sajavaara and Lauri Niinist{\"o} and Juhani Keinonen",
year = "2005",
language = "English",
volume = "382",
pages = "1791--1799",
journal = "Analytical and Bioanalytical Chemistry",
issn = "1618-2642",
publisher = "Springer",
}