ALD coating at lower temperature for polymers and carbon nanotube based transistors

TY - GEN

T1 - ALD coating at lower temperature for polymers and carbon nanotube based transistors

AU - Grigoras, K.

PY - 2011

Y1 - 2011

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

M3 - Conference article in proceedings

SN - 978-1-61839-112-4

SP - 6

EP - 11

BT - IMAPS Nordic Conference 2011, Espoo, 5 June 2011 - 8 June 2011

ER -