Advances in metallization of organically modified ceramics

Ashkan Bonabi; Ville Jokinen; Tiina Sikanen

Advances in metallization of organically modified ceramics

Ashkan Bonabi^*
, Ville Jokinen
, Tiina Sikanen

^*Tämän työn vastaava kirjoittaja

Kemian ja materiaalitieteen laitos

University of Helsinki

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Abstrakti

Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.

Alkuperäiskieli	Englanti
Otsikko	MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Kustantaja	Chemical and Biological Microsystems Society (CBMS)
Sivut	1445-1447
Sivumäärä	3
ISBN (painettu)	978-0-9798064-8-3
Tila	Julkaistu - 2015
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	International Conference on Miniaturized Systems for Chemistry and Life Sciences - Gyeongju, Etelä-Korea Kesto: 25 lokak. 2015 → 29 lokak. 2015 Konferenssinumero: 19

Julkaisusarja

Nimi
ISSN (painettu)	1556-5904

Conference

Conference	International Conference on Miniaturized Systems for Chemistry and Life Sciences
Lyhennettä	MicroTAS
Maa/Alue	Etelä-Korea
Kaupunki	Gyeongju
Ajanjakso	25/10/2015 → 29/10/2015

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@inproceedings{fa0b269f63d34edf93177aeb0531d324,

title = "Advances in metallization of organically modified ceramics",

abstract = "Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.",

author = "Ashkan Bonabi and Ville Jokinen and Tiina Sikanen",

year = "2015",

language = "English",

isbn = "978-0-9798064-8-3",

publisher = "Chemical and Biological Microsystems Society (CBMS)",

pages = "1445--1447",

booktitle = "MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences",

address = "United States",

note = "International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS ; Conference date: 25-10-2015 Through 29-10-2015",

}

Bonabi, A, Jokinen, V & Sikanen, T 2015, Advances in metallization of organically modified ceramics. julkaisussa MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Chemical and Biological Microsystems Society (CBMS), Sivut 1445-1447, International Conference on Miniaturized Systems for Chemistry and Life Sciences, Gyeongju, Etelä-Korea, 25/10/2015.

Advances in metallization of organically modified ceramics. / Bonabi, Ashkan; Jokinen, Ville; Sikanen, Tiina.
MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Chemical and Biological Microsystems Society (CBMS), 2015. s. 1445-1447.

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - Advances in metallization of organically modified ceramics

AU - Bonabi, Ashkan

AU - Jokinen, Ville

AU - Sikanen, Tiina

N1 - Conference code: 19

PY - 2015

Y1 - 2015

N2 - Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.

AB - Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.

UR - https://www.scopus.com/pages/publications/84983372347

M3 - Conference article in proceedings

SN - 978-0-9798064-8-3

SP - 1445

EP - 1447

BT - MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

PB - Chemical and Biological Microsystems Society (CBMS)

T2 - International Conference on Miniaturized Systems for Chemistry and Life Sciences

Y2 - 25 October 2015 through 29 October 2015

ER -

Advances in metallization of organically modified ceramics

Abstrakti

Julkaisusarja

Conference

YK:n kestävän kehityksen tavoitteet

Muut tiedostot ja linkit

Sormenjälki

Laitteet

Raaka-aineiden tutkimusinfrastruktuuri

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