@inproceedings{38195e8854e540af87b1a787a9afbb8e,
title = "Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectris",
keywords = "ALD, atomic layer deposition, high-k dielectrics, thin films, ALD, atomic layer deposition, high-k dielectrics, thin films, ALD, atomic layer deposition, high-k dielectrics, thin films",
author = "Lauri Niinist{\"o} and Minna Nieminen and Jaakko Niinist{\"o} and Matti Putkonen and Jani P{\"a}iv{\"a}saari",
year = "2003",
language = "English",
pages = "61",
booktitle = "E-MRS 2003 Fall Meeting, Varsova, Puola",
publisher = "European Materials Research Society",
address = "France",
}