@inproceedings{e2f786a9991f4528a55d0f069a28e8d6,
title = "Active Post-processing method to increase the electro-mechanical coupling in microresonators",
keywords = "micromechanics, rf-mems, micromechanics, rf-mems, micromechanics, rf-mems",
author = "Mika Koskenvuori and P. Rantakari and J. V{\"a}is{\"a}svaara and I. Tittonen and T. Mattila and A. Oja and V. Kaajakari and H. Sepp{\"a} and H. Kattelus and J. Kiiham{\"a}ki",
year = "2003",
language = "English",
pages = "675--676",
booktitle = "Eurosensors VXII, Guimar{\~a}es, Portugal, September 2003",
publisher = "University of Minho",
address = "Portugal",
}