@techreport{10263e7904ae494db5afb4a8d0459f19,
title = "Accelerometer Level 3 and 4 Models in APLAC",
keywords = "accelerometer model, APLAC, effective viscosity, electrical equivalent circuit, electromechanical analysis, squeezed-film effect, accelerometer model, APLAC, effective viscosity, electrical equivalent circuit, electromechanical analysis, squeezed-film effect, accelerometer model, APLAC, effective viscosity, electrical equivalent circuit, electromechanical analysis, squeezed-film effect",
author = "T. Veijola",
year = "1998",
language = "English",
isbn = "951-22-4057-2",
series = "Circuit Theory Laboratory Report Series",
publisher = "Helsinki University of Technology, Circuit Theory Laboratory",
number = "CT-36",
pages = "42",
type = "WorkingPaper",
institution = "Helsinki University of Technology, Circuit Theory Laboratory",
}