AC-coupled n-in-p pixel detectors on MCz silicon with atomic layer deposition (ALD) grown thin film

A. Gädda, Jennifer Ott, S. Bharthuar, Erik Brücken, Matti Kalliokoski, A. Karadzhinova-Ferrer, M. Bezak, S. Kirschenmann, V. Litichevsky, M. Golovleva, Laura Martikainen, Alexander Winkler, V. Chmill, E. Tuovinen, P. Luukka, Jaakko Härkönen