A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

Charles H. Winter; Charles L. Dezelah IV; Monika Wiedmann; Kenichiro Mizohata; Ronald J. Baird; Lauri Niinistö

A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

Charles H. Winter
, Charles L. Dezelah IV
, Monika Wiedmann
, Kenichiro Mizohata
, Ronald J. Baird
, Lauri Niinistö

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Otsikko	ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007
Tila	Julkaistu - 2007
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa

Siteeraa tätä

Winter, C. H., Dezelah IV, C. L., Wiedmann, M., Mizohata, K., Baird, R. J., & Niinistö, L. (2007). A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5. teoksessa ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007

@inproceedings{ccc944efccbf4231966a6ae487f73a10,

title = "A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5",

author = "Winter, \{Charles H.\} and \{Dezelah IV\}, \{Charles L.\} and Monika Wiedmann and Kenichiro Mizohata and Baird, \{Ronald J.\} and Lauri Niinist{\"o}",

year = "2007",

language = "English",

booktitle = "ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007",

}

A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5. / Winter, Charles H.; Dezelah IV, Charles L.; Wiedmann, Monika et al.
ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007. 2007.

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

AU - Winter, Charles H.

AU - Dezelah IV, Charles L.

AU - Wiedmann, Monika

AU - Mizohata, Kenichiro

AU - Baird, Ronald J.

AU - Niinistö, Lauri

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

BT - ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007

ER -