@inproceedings{a473cc6cb1e7442e90b9967701936b8d,
title = "A highly accurate engineering of silicon integrated microring resonators based on the nanofabrication technique",
keywords = "atomic layer deposition, chromatic dispersion, optical waveguides, ring resonators, silicon photonics, thin films, atomic layer deposition, chromatic dispersion, optical waveguides, ring resonators, silicon photonics, thin films, atomic layer deposition, chromatic dispersion, optical waveguides, ring resonators, silicon photonics, thin films",
author = "Mikhail Erdmanis and Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Seppo Honkanen and Ilkka Tittonen",
year = "2013",
doi = "10.1117/12.2007266",
language = "English",
pages = "1--6",
editor = "Joel Kubby",
booktitle = "SPIE Photonics West, San-Francisco, CA, USA, 2-7, February 2013",
publisher = "SPIE",
address = "United States",
}