13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

Pekka Rantakari; Ville Kaajakari; Jyrki Kiihamäki; Mika Koskenvuori; Ilkka Tittonen

13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

Pekka Rantakari, Ville Kaajakari, Jyrki Kiihamäki, Mika Koskenvuori, Ilkka Tittonen

Tietotekniikan laitos

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Otsikko	Proceedings of the XXXIX Annual Conference of the Finnish Physical Society
Toimittajat	Tomi Ruokola, Juhani von Boehm
Kustantaja	Helsinki University of Technology
Tila	Julkaistu - 2005
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	Physics Days: Annual Meeting of the Finnish Physical Society - Espoo, Suomi Kesto: 17 maalisk. 2005 → 19 maalisk. 2005 Konferenssinumero: 39

Julkaisusarja

Nimi	Report / Helsinki University of Technology, Laboratory of Physics
Kustantaja	Helsinki University of Technology
Numero	229

Conference

Conference	Physics Days
Maa/Alue	Suomi
Kaupunki	Espoo
Ajanjakso	17/03/2005 → 19/03/2005

Tutkimusalat

micromechanics
reference oscillator
rf-mems

Siteeraa tätä

Rantakari, P., Kaajakari, V., Kiihamäki, J., Koskenvuori, M., & Tittonen, I. (2005). 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. teoksessa T. Ruokola, & J. von Boehm (Toimittajat), Proceedings of the XXXIX Annual Conference of the Finnish Physical Society (Report / Helsinki University of Technology, Laboratory of Physics; Nro 229). Helsinki University of Technology.

Rantakari, Pekka ; Kaajakari, Ville ; Kiihamäki, Jyrki et al. / 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Toimittaja / Tomi Ruokola ; Juhani von Boehm. Helsinki University of Technology, 2005. (Report / Helsinki University of Technology, Laboratory of Physics; 229).

@inproceedings{579d228cfa9f49ad8444bfa95c9cd1c4,

title = "13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator",

keywords = "micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems",

author = "Pekka Rantakari and Ville Kaajakari and Jyrki Kiiham{\"a}ki and Mika Koskenvuori and Ilkka Tittonen",

year = "2005",

language = "English",

series = "Report / Helsinki University of Technology, Laboratory of Physics",

publisher = "Helsinki University of Technology",

number = "229",

editor = "Tomi Ruokola and {von Boehm}, Juhani",

booktitle = "Proceedings of the XXXIX Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "Physics Days : Annual Meeting of the Finnish Physical Society ; Conference date: 17-03-2005 Through 19-03-2005",

}

Rantakari, P, Kaajakari, V, Kiihamäki, J, Koskenvuori, M & Tittonen, I 2005, 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. julkaisussa T Ruokola & J von Boehm (toim), Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Report / Helsinki University of Technology, Laboratory of Physics, Nro 229, Helsinki University of Technology, Physics Days, Espoo, Suomi, 17/03/2005.

13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. / Rantakari, Pekka; Kaajakari, Ville; Kiihamäki, Jyrki et al.
Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. toim. / Tomi Ruokola; Juhani von Boehm. Helsinki University of Technology, 2005. (Report / Helsinki University of Technology, Laboratory of Physics; Nro 229).

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

AU - Rantakari, Pekka

AU - Kaajakari, Ville

AU - Kiihamäki, Jyrki

AU - Koskenvuori, Mika

AU - Tittonen, Ilkka

N1 - Conference code: 39

PY - 2005

Y1 - 2005

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

M3 - Conference article in proceedings

T3 - Report / Helsinki University of Technology, Laboratory of Physics

BT - Proceedings of the XXXIX Annual Conference of the Finnish Physical Society

A2 - Ruokola, Tomi

A2 - von Boehm, Juhani

PB - Helsinki University of Technology

T2 - Physics Days

Y2 - 17 March 2005 through 19 March 2005

ER -

Rantakari P, Kaajakari V, Kiihamäki J, Koskenvuori M, Tittonen I. 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. julkaisussa Ruokola T, von Boehm J, toimittajat, Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Helsinki University of Technology. 2005. (Report / Helsinki University of Technology, Laboratory of Physics; 229).