Traceable metrology of soft-X-ray to IR optical constants and nanofilms for advanced manufacturing

Engineering

1. Reflectance Spectrum 100%
2. Refractivity 50%
3. Refractive Index 50%
4. Layer Thickness 50%
5. Silicon Wafer 50%
6. Matrix Method 50%
7. Angle of Incidence 50%
8. Light Incident 50%
9. Thin Layer 50%
10. Thin Films 50%
11. Air Layer 50%