Hakutulokset

• ALD on particles: Literature collection and dataset

  Piechulla, P. M. (Creator), Mingliang, C. (Creator), Goulas, A. (Creator), Puurunen, R. (Creator) & van Ommen, J. R. (Creator), Zenodo, 28 heinäk. 2024

  DOI - pysyväislinkki: 10.5281/zenodo.12700975, https://zenodo.org/records/12700976

  Tietoaineisto: Dataset

• ALD Al2O3 thickness profile in microscopic rectangular channel, TMA-water 300 degC 500 cycles, PillarHall(TM) LHAR3-1b, V0001

  Ylivaara, O. (Creator), Puurunen, R. (Creator) & Marles, J. (Creator), Zenodo, 31 toukok. 2021

  DOI - pysyväislinkki: 10.5281/zenodo.3974438, https://zenodo.org/record/3974438

  Tietoaineisto: Dataset

• Examples of ALD saturation profiles in rectangular channel LHAR structures simulated with a diffusion-reaction model

  Verkama, E. (Creator), Yim, J. (Creator), Piironen, J. (Creator) & Puurunen, R. L. (Creator), Zenodo, 2020

  DOI - pysyväislinkki: 10.5281/zenodo.4354345, https://zenodo.org/record/4354346

  Tietoaineisto: Dataset

• Simulated thickness profiles of ALD film in a wide microchannel of 500 nm height published as Fig.4 in PCCP 24 (2022) 8645-8660

  Yim, J. (Creator), Verkama, E. (Creator) & Puurunen, R. L. (Creator), Zenodo, 2023

  DOI - pysyväislinkki: 10.5281/zenodo.6997242, https://zenodo.org/record/6997243

  Tietoaineisto: Dataset

• DReaM-ALD – Diffusion-Reaction Model for Atomic Layer Deposition

  Verkama, E. (Creator) & Puurunen, R. L. (Creator), Zenodo, 22 maalisk. 2023

  DOI - pysyväislinkki: 10.5281/zenodo.7759194, https://zenodo.org/record/7759195

  Tietoaineisto: Ohjelmisto tai koodi