Material Science
Actuator
50%
Aluminum
10%
Aluminum Nitride
100%
Devices
12%
Electrode
12%
Finite Element Methods
20%
Microelectromechanical System
80%
Molybdenum
10%
Nanocrystalline Material
10%
Nitride Compound
12%
Piezoelectricity
100%
Scanning Electron Microscopy
12%
Silicon
20%
Surface
25%
Thin Films
37%
Titanium
12%
Engineering
Actuation
41%
Aluminum
33%
Applications
8%
Area Reduction
10%
Demonstrates
8%
Design Optimization
8%
Fabrication
8%
Finite Element Modeling
25%
Measurer
8%
Microelectromechanical System
50%
Moore Device
10%
Nitride Layer
10%
Peak Value
8%
Piezoelectric
50%
Piezoelectric Material
8%
Research
8%
Scaling
8%
Sensor
8%
Side Wall
16%
Simulation
16%
Stiction
10%
Surfaces
50%
Thin Films
8%
Transducer
50%
