Material Science
Piezoelectricity
100%
Aluminum Nitride
100%
Microelectromechanical System
80%
Actuator
50%
Thin Films
37%
Surface
25%
Silicon
20%
Finite Element Methods
20%
Scanning Electron Microscopy
12%
Electrode
12%
Titanium
12%
Nitride Compound
12%
Devices
12%
Molybdenum
10%
Nanocrystalline Material
10%
Aluminum
10%
Engineering
Surfaces
50%
Microelectromechanical System
50%
Piezoelectric
50%
Transducer
50%
Actuation
41%
Aluminum
33%
Finite Element Modeling
25%
Simulation
16%
Side Wall
16%
Nitride Layer
10%
Moore Device
10%
Area Reduction
10%
Stiction
10%
Research
8%
Demonstrates
8%
Applications
8%
Fabrication
8%
Piezoelectric Material
8%
Peak Value
8%
Sensor
8%
Thin Films
8%
Measurer
8%
Design Optimization
8%
Scaling
8%
