Supporting data for the manuscript "A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers"

Marek Patočka (Creator)
Nikhilendu Tiwary (Creator)
Sami Suihkonen (VTT Technical Research Centre of Finland Ltd.) (Creator)
Mervi Paulasto-Kröckel (Creator)

Sähkötekniikan ja automaation laitos
Electronics Integration and Reliability

Tietoaineisto

Description

Koska saatavilla	20 tammik. 2026
Julkaisija	Zenodo

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CC-BY-4.0

DOI-pysyväislinkki
10.5281/zenodo.18312920

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Supporting data for the manuscript "A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers"

Description

Dataset Licences

DOI-pysyväislinkki

Siteeraa tätä