JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (Lehti)

  • Kirill Isakov (Vertaisarvioija)

Aktiviteetti: Tieteellisen lehden refereenä toimiminen

Description

Review of article 'X-ray scattering techniques for characterizing optical properties of TiO2 and Al2O3 antireflection coatings', which was later published as 'Grazing-incidence small angle x-ray scattering, x-ray reflectivity, and atomic force microscopy: A combined approach to assess atomic-layer-deposited Al2O3 dielectric films'
Aikajakso4 lokak. 201725 lokak. 2017
Julkaisun tyyppiJulkaisu
Issn0734-2101
Tunnustuksen arvoInternational