Zirconia thin films by atomic layer epitaxy.A comparative study on the use of novel precursors with ozone

Matti Putkonen, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)3141-3147
    JournalJournal of Materials Chemistry
    Volume11
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • ALE
    • atomic layer deposition
    • atomic layer epitaxy
    • thin film
    • ZrO_(2)

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