X-ray diffraction analysis of superlattices grown on misoriented substrates
Research output: Contribution to journal › Article › Scientific › peer-review
- University of Sheffield
X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.
|Number of pages||4|
|Journal||Journal of Crystal Growth|
|Publication status||Published - 1 Dec 1991|
|MoE publication type||A1 Journal article-refereed|