X-ray diffraction analysis of superlattices grown on misoriented substrates

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  • University of Sheffield


X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.


Original languageEnglish
Pages (from-to)569-572
Number of pages4
JournalJournal of Crystal Growth
Issue number4
Publication statusPublished - 1 Dec 1991
MoE publication typeA1 Journal article-refereed

ID: 5545207