X-ray topography studies of dislocation distributions in Si during proximity thermal diffusion

D. Lowney; P.J. McNally; M. Nolan; T. Perova; Turkka Tuomi; R. Rantamäki; A.N. Danilewsky

X-ray topography studies of dislocation distributions in Si during proximity thermal diffusion

D. Lowney, P.J. McNally, M. Nolan, T. Perova, Turkka Tuomi, R. Rantamäki, A.N. Danilewsky

Research output: Working paper › Professional

Original language	English
Place of Publication	Hampuri
Pages	915-916
Publication status	Published - 2000
MoE publication type	D4 Published development or research report or study

Publication series

Name	HASYLAB-DESY Annual Report 1999, Part I

Keywords

dislocations
silicon
synchrotron x-ray topography

Cite this

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title = "X-ray topography studies of dislocation distributions in Si during proximity thermal diffusion",

keywords = "dislocations, silicon, synchrotron x-ray topography, dislocations, silicon, synchrotron x-ray topography, dislocations, silicon, synchrotron x-ray topography",

author = "D. Lowney and P.J. McNally and M. Nolan and T. Perova and Turkka Tuomi and R. Rantam{\"a}ki and A.N. Danilewsky",

year = "2000",

language = "English",

series = "HASYLAB-DESY Annual Report 1999, Part I",

pages = "915--916",

type = "WorkingPaper",

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TY - UNPB

T1 - X-ray topography studies of dislocation distributions in Si during proximity thermal diffusion

AU - Lowney, D.

AU - McNally, P.J.

AU - Nolan, M.

AU - Perova, T.

AU - Tuomi, Turkka

AU - Rantamäki, R.

AU - Danilewsky, A.N.

PY - 2000

Y1 - 2000

KW - dislocations

KW - silicon

KW - synchrotron x-ray topography

KW - dislocations

KW - silicon

KW - synchrotron x-ray topography

KW - dislocations

KW - silicon

KW - synchrotron x-ray topography

M3 - Working paper

T3 - HASYLAB-DESY Annual Report 1999, Part I

SP - 915

EP - 916

BT - X-ray topography studies of dislocation distributions in Si during proximity thermal diffusion

CY - Hampuri

ER -