X-ray diffraction analysis of superlattices grown on misoriented substrates

P. Ravila; V. M. Airaksinen; H. Lipsanen; T. Tuomi; P. A. Claxton

doi:10.1016/0022-0248(91)90402-Q

X-ray diffraction analysis of superlattices grown on misoriented substrates

P. Ravila^*, V. M. Airaksinen, H. Lipsanen, T. Tuomi, P. A. Claxton

^*Corresponding author for this work

University of Sheffield

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

Abstract

X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an In_xGa_1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

Original language	English
Pages (from-to)	569-572
Number of pages	4
Journal	Journal of Crystal Growth
Volume	114
Issue number	4
DOIs	https://doi.org/10.1016/0022-0248(91)90402-Q
Publication status	Published - 1 Dec 1991
MoE publication type	A1 Journal article-refereed

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10.1016/0022-0248(91)90402-Q

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title = "X-ray diffraction analysis of superlattices grown on misoriented substrates",

abstract = "X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7\% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.",

author = "P. Ravila and Airaksinen, \{V. M.\} and H. Lipsanen and T. Tuomi and Claxton, \{P. A.\}",

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T1 - X-ray diffraction analysis of superlattices grown on misoriented substrates

AU - Ravila, P.

AU - Airaksinen, V. M.

AU - Lipsanen, H.

AU - Tuomi, T.

AU - Claxton, P. A.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

AB - X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

UR - https://www.scopus.com/pages/publications/0026383218

U2 - 10.1016/0022-0248(91)90402-Q

DO - 10.1016/0022-0248(91)90402-Q

M3 - Article

AN - SCOPUS:0026383218

SN - 0022-0248

VL - 114

SP - 569

EP - 572

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 4

ER -

X-ray diffraction analysis of superlattices grown on misoriented substrates

Abstract

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