Abstract
X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.
Original language | English |
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Pages (from-to) | 569-572 |
Number of pages | 4 |
Journal | Journal of Crystal Growth |
Volume | 114 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1 Dec 1991 |
MoE publication type | A1 Journal article-refereed |