X-ray diffraction analysis of superlattices grown on misoriented substrates

P. Ravila*, V. M. Airaksinen, H. Lipsanen, T. Tuomi, P. A. Claxton

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)

    Abstract

    X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2° can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.

    Original languageEnglish
    Pages (from-to)569-572
    Number of pages4
    JournalJournal of Crystal Growth
    Volume114
    Issue number4
    DOIs
    Publication statusPublished - 1 Dec 1991
    MoE publication typeA1 Journal article-refereed

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