Abstract
This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.
| Original language | English |
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| Patent number | US2012176609 |
| IPC | H01L 29/ 84 A I |
| Priority date | 10/09/2010 |
| Publication status | Published - 12 Jul 2012 |
| MoE publication type | H1 Granted patent |