Wireless MEMS sensor and method of reading the same

Ville Viikari (Inventor), Heikki Seppä (Inventor)

Research output: Patent


This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.

Original languageEnglish
Patent numberUS2012176609
IPCH01L 29/ 84 A I
Priority date10/09/2010
Publication statusPublished - 12 Jul 2012
MoE publication typeH1 Granted patent


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