This document describes a wireless sensor comprising a MEMS resonator and an antenna directly matched thereto. Also a method of reading the wireless sensor is described. The method comprises illuminating the wireless sensor with electromagnetic energy at a first and second frequencies and receiving an intermodulation signal emitted by the wireless sensor in response to said electromagnetic energy at the first and second frequencies.
|IPC||H01L 29/ 84 A I|
|Publication status||Published - 12 Jul 2012|
|MoE publication type||H1 Granted patent|