Where is silicon based MEMS heading to?

Mervi Paulasto-Kröckel, Markku Tilli, Glenn Ross, Heikki Kuisma

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies (Third Edition)
Subtitle of host publicationMicro and Nano Technologies
Number of pages9
ISBN (Print)9780128177860
Publication statusPublished - 2020
MoE publication typeB2 Part of a book or another research book

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