Where is silicon based MEMS heading to?

Mervi Paulasto-Kröckel, Markku Tilli, Glenn Ross, Heikki Kuisma

Research output: Chapter in Book/Report/Conference proceedingChapterScientific

Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies (Third Edition)
Subtitle of host publicationMicro and Nano Technologies
PublisherElsevier
Pagesxxi-xxix
Number of pages9
ISBN (Print)9780128177860
DOIs
Publication statusPublished - 2020
MoE publication typeB2 Part of a book or another research book

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