Wafer warpage, crystal bending and interface properties of 4H-SiC epi-wafers

A. Ellison, H. Radamson, M. Tuominen, S. Milita, C. Hallin, A. Henry, O. Kordina, T. Tuomi, R. Yakimova, R. Madar, E. Janzen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationDiamond and Related Materials. Proceedings of the First European Conference on SiC related materials, Crete, Greece, 6-9 October 1996
    Place of PublicationCrete, Greece
    Publication statusPublished - 1996
    MoE publication typeA4 Article in a conference publication


    • optoelectronics
    • semiconductors

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