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Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics
Andreas C. Liapis*, Vincent Pelgrin, Peng Liu, Xiaoqi Cui, Jose M.A. Rosa, Heli Seppannen, Diao Li, Igor Reduto, Seppo Honkanen, Harri Lipsanen, Zhipei Sun
*Corresponding author for this work
Research output: Contribution to conference › Abstract › Scientific › peer-review
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(Scopus)