Wafer-Scale Atomic-Layer-Deposition of Er3+- and Yb3+- Doped Gain Materials for Integrated Photonics

Andreas C. Liapis*, Vincent Pelgrin, Peng Liu, Xiaoqi Cui, Jose M.A. Rosa, Heli Seppannen, Diao Li, Igor Reduto, Seppo Honkanen, Harri Lipsanen, Zhipei Sun

*Corresponding author for this work

Research output: Contribution to conference › Abstract › Scientific › peer-review

1 Citation (Scopus)

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