Original language | English |
---|---|
Pages (from-to) | 223-226 |
Journal | Physica Scripta |
Issue number | T114 |
Publication status | Published - 2004 |
MoE publication type | A1 Journal article-refereed |
Keywords
- adhesive bonding
- microchannel and cavity
- photoresist
- SU-8
S. Tuomikoski, S. Franssila
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 223-226 |
Journal | Physica Scripta |
Issue number | T114 |
Publication status | Published - 2004 |
MoE publication type | A1 Journal article-refereed |