Visualization of in- and out-of-plane vibrations in a micromechanical RF-resonator

Olli Holmgren, Kimmo Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamäki, Jouni V. Knuuttila, Martti M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Title of host publication2004 IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference, Montréal, Kanada, 23-27.8.2004
    Place of PublicationMontréal, Kanada
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication

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