Original language | English |
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Title of host publication | 2004 IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference, Montréal, Kanada, 23-27.8.2004 |
Place of Publication | Montréal, Kanada |
Pages | 1359 |
Publication status | Published - 2005 |
MoE publication type | A4 Conference publication |
Visualization of in- and out-of-plane vibrations in a micromechanical RF-resonator
Olli Holmgren, Kimmo Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamäki, Jouni V. Knuuttila, Martti M. Salomaa
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
6
Citations
(Scopus)