Visible Luminescence from Si/SiO2 Superlattices

S. Novikov, J. Sinkkonen, O. Kilpelä

Research output: Contribution to journalArticleScientificpeer-review

37 Citations (Scopus)
Original languageEnglish
Pages (from-to)1471-1473
JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Issue number4
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed


  • luminescence
  • MBE
  • Si
  • SiO2
  • superlattices

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