Visible Luminescence from Si/SiO2 Superlattices

S. Novikov, J. Sinkkonen, O. Kilpelä

Research output: Contribution to journalArticleScientificpeer-review

37 Citations (Scopus)
Original languageEnglish
Pages (from-to)1471-1473
JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Volume15
Issue number4
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

Keywords

  • luminescence
  • MBE
  • Si
  • SiO2
  • superlattices

Cite this