| Original language | English |
|---|---|
| Title of host publication | Fourth International Conference on Materials for Microelectronics and Nanoengineering, Espoo, Finland, June, 2002 |
| Pages | 129-132 |
| Publication status | Published - 2002 |
| MoE publication type | A4 Conference publication |
Very High-Q Micromechanical 14 MHz Resonator on SOI
Mika Koskenvuori
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review