Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

Hannu S. Laine, Henri Vahlman, Antti Haarahiltunen, Mallory A. Jensen, Chiara Modanese, Matthias Wagner, Franziska Wolny, Tonio Buonassisi, Hele Savin*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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