Vapor-phase self-assembled monolayers for improved MEMS reliability

Anna Rissanen*, Kirsi Tappura, Mari Laamanen, Riikka Puurunen, Elina Färm, Mikko Ritala, Markku Leskelä

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)


This paper presents the application of vapor-phase DDMS (dichlorodimethylsilane) self-assembled monolayer (SAM) coating which significantly reduced stiction behavior in optical MEMS components exposed to humidity. Previously SAMs have been deposited in liquid form, making them unsuitable for application in high aspect ratio MEMS/NEMS structures; now vapor-phase SAM deposition is a novel option for improving MEMS in-use reliability. DDMS and ODS (noctadecyltrimethoxysilane) SAM coatings were tested on surfaces with different pre-treatments and the quality of coatings was assessed through static water contact angle measurements and humidity exposure tests for both test membrane structures (100% stiction on uncoated structures vs. 17% stiction of DDMS SAM coated structures) and optical MEMS FPI components (0% stiction of DDMS SAM coated components). The obtained contact angle of the DDMS SAM coating was ∼ 104°. Both long term stability and thermal stability of the DDMS SAM coatings were found to be good.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Number of pages4
Publication statusPublished - 2010
MoE publication typeA4 Conference publication
EventIEEE SENSORS - Waikoloa, United States
Duration: 1 Nov 20104 Nov 2010
Conference number: 9


Country/TerritoryUnited States


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