| Original language | English |
|---|---|
| Patent number | 9909211 |
| Publication status | Published - 6 Mar 2018 |
| MoE publication type | H1 Granted patent |
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Vapor deposition of LiF thin films
- Miia Mäntymäki (Inventor)
- , Jani Hämäläinen (Inventor)
- , Mikko Ritala (Inventor)
- , Markku Leskelä (Inventor)
Research output: Patent