Vapor deposition of LiF thin films

Research output: PatentScientific

Researchers

  • Miia Mäntymäki

    (Inventor)
  • Jani Hämäläinen (Inventor)
  • Mikko Ritala (Inventor)
  • Markku Leskelä (Inventor)

Research units

  • University of Helsinki

Details

Original languageEnglish
Patent number9909211
Publication statusPublished - 6 Mar 2018
MoE publication typeH1 Granted patent

ID: 28853579