| Original language | English |
|---|---|
| Patent number | 9909211 |
| Publication status | Published - 6 Mar 2018 |
| MoE publication type | H1 Granted patent |
Vapor deposition of LiF thin films
Miia Mäntymäki (Inventor), Jani Hämäläinen (Inventor), Mikko Ritala (Inventor), Markku Leskelä (Inventor)
Research output: Patent