Vapor deposition of LiF thin films

Miia Mäntymäki (Inventor), Jani Hämäläinen (Inventor), Mikko Ritala (Inventor), Markku Leskelä (Inventor)

Research output: Patent

Original languageEnglish
Patent number9909211
Publication statusPublished - 6 Mar 2018
MoE publication typeH1 Granted patent

Cite this

Mäntymäki, M., Hämäläinen, J., Ritala, M., & Leskelä, M. (2018). Vapor deposition of LiF thin films. (Patent No. 9909211).