Vacancy-type defect distributions of (11)B-, (14)N and (27)Al-implanted 4H-SiC studied by positron annihilation spectroscopy

M.S. Janson; J. Slotte; A.Yu Kuznetsov; K. Saarinen; A. Hallén

Vacancy-type defect distributions of (11)B-, (14)N and (27)Al-implanted 4H-SiC studied by positron annihilation spectroscopy

M.S. Janson
, J. Slotte
, A.Yu Kuznetsov
, K. Saarinen
, A. Hallén

Department of Applied Physics

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	641-644
Journal	Materials Science Forum
Volume	433-436
Publication status	Published - 2003
MoE publication type	A1 Journal article-refereed

Keywords

Defects, Ion implantation, Positron annihilation spectroscopy

Cite this

@article{c9756e0373a6460ab47f427e70a36d66,

title = "Vacancy-type defect distributions of (11)B-, (14)N and (27)Al-implanted 4H-SiC studied by positron annihilation spectroscopy",

keywords = "Defects, Ion implantation, Positron annihilation spectroscopy, Defects, Ion implantation, Positron annihilation spectroscopy, Defects, Ion implantation, Positron annihilation spectroscopy",

author = "M.S. Janson and J. Slotte and A.Yu Kuznetsov and K. Saarinen and A. Hall{\'e}n",

year = "2003",

language = "English",

volume = "433-436",

pages = "641--644",

journal = "Materials Science Forum",

issn = "1662-9760",

publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Vacancy-type defect distributions of (11)B-, (14)N and (27)Al-implanted 4H-SiC studied by positron annihilation spectroscopy

AU - Janson, M.S.

AU - Slotte, J.

AU - Kuznetsov, A.Yu

AU - Saarinen, K.

AU - Hallén, A.

PY - 2003

Y1 - 2003

KW - Defects, Ion implantation, Positron annihilation spectroscopy

M3 - Article

SN - 1662-9760

VL - 433-436

SP - 641

EP - 644

JO - Materials Science Forum

JF - Materials Science Forum

ER -