Vacancy related defect distributions in B-11, N-14 and Al-27 implanted 4H-SiC: The role of channeling

M.S. Janson, Jonatan Slotte, A.Yu Kuznetsov, Kimmo Saarinen, A. Hallen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)57-63
JournalJournal of Applied Physics
Issue number1
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed


  • positron

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