Undercut edges for robust capillary self-alignment in hybrid microassembly

Ville Liimatainen, Veikko Sariola, Quan Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationThe 8th Annual IEEE Inteernational Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS2013), Suzhou, China, April 7-10, 2013
Place of PublicationSuzhou, China
PublisherIEEE
Pages4
ISBN (Electronic)978-1-4673-6352-5
Publication statusPublished - 2013
MoE publication typeA4 Article in a conference publication

Keywords

  • microassembly
  • microfabrication
  • self-alignment
  • surface tension
  • wetting

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