Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies

A.J. Niskanen, T. Ylinen-Hinkka, Sakari Kulmala, S. Franssila

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5779-5782
    JournalThin Solid Films
    Volume517
    Issue number19
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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