Ultrahigh-frequency synthetic diffractive elements

E. Tervonen, J. Turunen, M. Paalanen, J. Pekola

Research output: Contribution to journalArticleProfessional

Original languageEnglish
JournalSPIE Holography Newsletter
Volume4
Issue number1
Publication statusPublished - 1994
MoE publication typeD1 Article in a trade journal

Keywords

  • diffraction
  • gratings
  • lithography

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