Tunneling Current Characteristics of Plasma Oxidized Ultrathin SiO2

T. Tuurnala, T. Majamaa

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)310-311
JournalPhysica Scripta
VolumeT69
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

Keywords

  • silicon dioxide
  • tunneling current
  • ultrathin

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