Original language | English |
---|---|
Journal | Applied Surface Science |
Volume | 53 |
Publication status | Published - 1991 |
MoE publication type | A1 Journal article-refereed |
Keywords
- silicon films
- sputtered tungsten
- tungsten silicide
J.M. Molarius, S. Franssila, G. Drozdy, J. Saarilahti
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Journal | Applied Surface Science |
Volume | 53 |
Publication status | Published - 1991 |
MoE publication type | A1 Journal article-refereed |