Tungsten silicide formation from sequentially sputtered tungsten and silicon films

J.M. Molarius, S. Franssila, G. Drozdy, J. Saarilahti

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
JournalApplied Surface Science
Volume53
Publication statusPublished - 1991
MoE publication typeA1 Journal article-refereed

Keywords

  • silicon films
  • sputtered tungsten
  • tungsten silicide

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