Transimission electron energy-loss spectroscopy measurements of the dielectric function of Si/SiO2 multilayers

J. Keränen, T. Lepistö, L. Ryen, S.V. Novikov, E. Olsson

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)6827-6831
JournalJournal of Applied Physics
Issue number12
Publication statusPublished - 1998
MoE publication typeA1 Journal article-refereed


  • spectroscopy measurements

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