Transimission electron energy-loss spectroscopy measurements of the dielectric function of Si/SiO2 multilayers

J. Keränen, T. Lepistö, L. Ryen, S.V. Novikov, E. Olsson

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

Keywords

@article{7dc411e613d146f2a05bc68163c7ffec,

title = "Transimission electron energy-loss spectroscopy measurements of the dielectric function of Si/SiO2 multilayers",

keywords = "spectroscopy measurements, spectroscopy measurements, spectroscopy measurements",

author = "J. Ker{\"a}nen and T. Lepist{\"o} and L. Ryen and S.V. Novikov and E. Olsson",

year = "1998",

language = "English",

volume = "84",

pages = "6827--6831",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - Transimission electron energy-loss spectroscopy measurements of the dielectric function of Si/SiO2 multilayers

AU - Keränen, J.

AU - Lepistö, T.

AU - Ryen, L.

AU - Novikov, S.V.

AU - Olsson, E.

PY - 1998

Y1 - 1998

KW - spectroscopy measurements

M3 - Article

SN - 1089-7550

VL - 84

SP - 6827

EP - 6831

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

ER -