@article{f9b9ec9c55764edeaff94518323ecd3b,
title = "Transient Capacitance Measurement of MEM Capacitor",
keywords = "capacitance measurement, MEM varactor, Reliability, transient capacitance, capacitance measurement, MEM varactor, Reliability, transient capacitance, capacitance measurement, MEM varactor, Reliability, transient capacitance",
author = "Heikki Nieminen and Jari Hyyryl{\"a}inen and Timo Veijola and Tapani Ryh{\"a}nen and V. Ermolov",
year = "2005",
language = "English",
volume = "A117",
pages = "267--272",
journal = "Sensors and Actuators A",
issn = "1873-3069",
publisher = "Elsevier",
}