Transient Capacitance Measurement of MEM Capacitor

Heikki Nieminen, Jari Hyyryläinen, Timo Veijola, Tapani Ryhänen, V. Ermolov

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)267-272
    JournalSensors and Actuators A
    VolumeA117
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • capacitance measurement
    • MEM varactor
    • Reliability
    • transient capacitance

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