Total reflection X-ray topography for the observation of misfit dislocation strain at the surface of a Si/Ge-Si heterostructure

Research output: Contribution to journalArticle


  • P.J. McNally
  • G. Dilliway
  • J.M. Bonar
  • A. Willoughby
  • T. Tuomi
  • R. Rantamäki
  • A.N. Danilewsky
  • D. Lowney

Research units


Original languageEnglish
Pages (from-to)121-130
JournalJournal of X-Ray Science and Technology
Issue number9
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

    Research areas

  • Si-Ge heterostructure, synchrotron x-ray topography

ID: 4153324