Topographic Analysis of the Crystal Quality of Globally Available SiC Wafers

aapo Lankinen, I. Brazil, P.J. McNally, N. Ren, Lisa O´Reilly, A. Danilewsky, Turkka Tuomi, Antti Säynätjoki, R. Simon, S. Soloviev, L.B. Rowland, P.M. Sandvik

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2006
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe 6th European Conference on Silicon Carbide and Related Materials ECSCRM 2006, 3-7.9.2006, Newcastle-upon-Tyne, UK

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